杨自由,范彦平,张晓焱.基于机器学习的声表面波温度传感器快速优化设计[J].包装工程,2022,43(15):241-246.
YANG Zi-you,FAN Yan-ping,ZHANG Xiao-yan.Rapid Optimization Design of Surface Acoustic Wave TemperatureSensor Based on Machine Learning[J].Packaging Engineering,2022,43(15):241-246. |
| 基于机器学习的声表面波温度传感器快速优化设计 |
| Rapid Optimization Design of Surface Acoustic Wave TemperatureSensor Based on Machine Learning |
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| DOI：10.19554/j.cnki.1001-3563.2022.15.028 |
| 中文关键词: 声表面波 机器学习 多项式回归 温度传感器 |
| 英文关键词: surface acoustic wave machine learning polynomial regression temperature sensor |
| 基金项目:国家自然科学基金(51705326，52075339) |
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| 中文摘要: |
| 目的 为提高声表面波谐振器(SAWR)性能，制造高性能声表面波(SAW)温度传感器。方法 通过FEM/BEM理论，建立SAW温度传感器精确仿真优化模型，基于此模型对敏感基片的欧拉角进行大步长优化;同时，结合仿真数据并利用多项式回归模型对敏感基片的欧拉角进行小步长快速优化。结果 文中提出的FEM/BEM仿真模型与机器学习相结合优化设计方法不仅能够实现SAWR的精确模拟，而且可大幅提高优化效率。优化结果与实际器件的中心频率相对误差为0.4%，Q值相对误差为1.2%。文中提出的FEM/BEM仿真模型与机器学习相结合优化设计方法与纯FEM/BEM方法相比，单个切型计算速度提高了2 000多倍。结论 所设计的优化系统可用于谐振器敏感基片切型的快速优化设计，可缩短高性能SAW温度传感器的开发周期。 |
| 英文摘要: |
| The work aims to improve the performance of surface acoustic wave resonator (SAWR), and manufacture a high-performance surface acoustic wave temperature sensor. Based on the FEM/BEM theory, an accurate simulation optimization model of SAW temperature sensor was established, and the Euler angle of the sensitive substrate was optimized in large steps based on this model. At the same time, the Euler angle of the sensitive substrate was optimized quickly in small steps with the polynomial regression model in combination with the simulation data. The optimization design method combining FEM/BEM simulation model and machine learning proposed in this paper could not only realize the accurate simulation of SAWR, but also greatly improved the optimization efficiency. The relative error of the optimized result and the actual device's center frequency was 0.4%, and the relative error of the Q value was 1.2%. Compared with the pure FEM/BEM method, its speed of single cutting calculation was increased by more than 2000 times. The designed optimization system can be used to quickly optimize the design of the resonator's sensitive substrate cutting, which can shorten the development cycle of high-performance SAW temperature sensors. |
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