武秋敏,徐磊,袁方,武吉梅.压电喷墨驱动器特性研究及参数优化[J].包装工程,2021,42(5):187-192.
WU Qiu-min,XU Lei,YUAN Fang,WU Ji-mei.Characteristics and Parameter Optimization of Piezoelectric Inkjet Actuator[J].Packaging Engineering,2021,42(5):187-192. |
| 压电喷墨驱动器特性研究及参数优化 |
| Characteristics and Parameter Optimization of Piezoelectric Inkjet Actuator |
| 投稿时间：2020-06-22 |
| DOI：10.19554/j.cnki.1001-3563.2021.05.024 |
| 中文关键词: 压电喷墨 结构优化 正交试验 |
| 英文关键词: piezoelectric inkjet structure optimization orthogonal test |
| 基金项目:陕西省教育厅重点科学研究计划(20JY054) |
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| 中文摘要: |
| 目的 研究压电驱动器结构参数对其驱动性能的影响，并对其结构进行优化，为进一步研究压电喷墨的喷射特性奠定基础。方法 总结近年来压电喷墨印刷技术的研究现状，利用有限元数值模拟软件Comsol Multiphysics建立压电驱动器的数值模型，分析压电薄膜PZT、SiO2振动板和Parylene保护层这3个部分的结构尺寸对压电驱动器位移的影响规律，并且利用正交试验方法确定压电驱动器主要部件的最优尺寸。结果 压电驱动器的结构尺寸对其振幅有较大影响，不同的结构组合可以得到不同的压电驱动器位移。在压电薄膜与振动板宽度之比为0.7，振动板宽度为140 μm，保护层厚度为0.7 μm，振动板厚度为0.9 μm，压电薄膜厚度为1 μm时，驱动器位移达到最大。结论 通过对压电驱动器的结构尺寸进行优化，可使驱动器位移达到最大，从而使其驱动性能最优。 |
| 英文摘要: |
| The work aims to study the influence of structural parameters of piezoelectric actuator on its driving performance, and optimize its structure, so as to lay a foundation for further research on the jet characteristics of piezoelectric inkjet. The research status of piezoelectric inkjet printing technology in recent years was summarized. The numerical model of piezoelectric actuator was established by finite element numerical simulation software Comsol Multiphysics. The influence rule of structure size of PZT, SiO2 vibrating plate and Parylene protective layer on the displacement of piezoelectric actuator was analyzed. The optimal size of the main components of the piezoelectric actuator was determined by orthogonal test. The structure size of the piezoelectric actuator had great influence on its amplitude, and the displacement of the actuator could be obtained by different structure combinations. The displacement of the actuator reached the maximum when the ratio of the width of the piezoelectric film to the vibration plate was 0.7, the width of the vibration plate was 140 μm, the thickness of the protective layer was 0.7 μm, the thickness of the vibration plate was 0.9 μm, and the thickness of the piezoelectric film was 1 μm. By optimizing the structure size of the piezoelectric actuator, the displacement of the actuator can be maximized, so that its driving performance can be optimized. |
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