孙智慧,肖玮,林晶,智慧,张莉,董文丽,朱琳.卷绕式磁控溅射镀膜机张力控制系统分析与优化[J].包装工程,2013,34(23):72-76.
SUN Zhi-hui,XIAO Wei,LIN Jing,ZHI Hui,ZHANG Li,DONG Wen-li,ZHU Lin.Analysis and Optimization of Tension Control System of Winding Magnetron Sputtering Coating Machine[J].Packaging Engineering,2013,34(23):72-76. |
| 卷绕式磁控溅射镀膜机张力控制系统分析与优化 |
| Analysis and Optimization of Tension Control System of Winding Magnetron Sputtering Coating Machine |
| 投稿时间：2013-10-21 修订日期：2013-12-10 |
| DOI： |
| 中文关键词: 张力 磁控溅射 镀膜 卷绕 simulink |
| 英文关键词: tension magnetron sputtering coating winding simulink |
| 基金项目:哈尔滨市科技创新人才研究专项资金项目(2011RFXXG018) |
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| 中文摘要: |
| 为避免卷绕式磁控溅射镀膜过程中张力引起的薄膜缺陷,以及原有张力系统响应速度慢、稳定性差等不足,对张力系统进行了分析与优化。通过分析确定了影响张力的关键因素是收(放) 卷的速度和卷径变化,建立了张力系统动力学模型,采用simulink 对张力控制系统进行仿真分析,利用实验验证的方法,分别在原设备和改造后的设备上制备Al2 O3 薄膜,并对比其SEM 图像。改造后的系统可在0. 65 s 内实现薄膜张力实时调整,而原系统需要8 s。改造后的系统能够保证镀制过程中的张力恒定,膜层致密均匀、卷材层间无空隙和皱纹。 |
| 英文摘要: |
| In order to avoid the film defect caused by tension in the process of winding magnetron sputtering coating as well as the slow response and poor stability of original tension system, the tension system was analyzed and optimized. It was determined through analysis that the key factors influencing tension are the speed of winding and unwinding as well as the change of the roller's diameter. The dynamics model of tension system was established and Simulink was used for simulation analysis of the tension control system. Al2 O3 films were prepared in original equipment and transformed equipment respectively for experimental verification. The SEM images of Al2 O3 prepared in different ways of tension control were compared. The result showed that the reconstructed system can realize real-time adjustment of the film tension in 0. 65 s, but the original system need 8 s; the reconstructed system can ensure constant tension, compact and uniform film layer, and no wrinkle and gap between the film layers. |
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